光学非球面检测平台伺服控制系统研究  

Study on Servo Control System of Measurement Platform for Optical Aspheric Surfaces

作　　者：郭隐彪[1] 杨平[1] 刘建春[2] 

机构地区：[1]厦门大学,厦门361005 [2]厦门理工学院,厦门361005

出　　处：《中国机械工程》2007年第14期1639-1643,共5页China Mechanical Engineering

基　　金：国家863高技术研究发展计划资助项目(8638042416);厦门大学创新团队资助项目

摘　　要：根据高精度非球面表面检测的要求,设计了一种用于微纳精度测量的光学非球面检测平台伺服控制系统。系统基于DSP芯片控制技术,采用Ti公司生产的TMS320F2812芯片为运动控制电路的核心;基于Windows操作平台和CCS2.0集成开发工具进行软件开发。系统设计的目的是实现平台的多轴运动控制及伺服运动控制系统的软硬件模块的扩展。通过试验和运动仿真对系统的稳定性和精度进行了分析,分析结果表明系统达到了较高的定位控制精度。According to the requirements of high precision measurement of aspheric surfaces, a servo control system which was used for the micro--nanometer accuracy measurement platform for optical aspheric surfaces was established. The system was based on the control technology of high performance DSP chip. The chip,TMS320F2812 produced by Ti Company,was as the core of motion control circuit. Under Windows operating system and CCS2.0, the software development was accomplished. The system was designed to achieve multi--axis motion control and to expand the hardware and software module for the servo motion control part. The stability and accuracy of the system was analyzed separately by simulation and experiment. The results show that the system has better performance in positioning control.

关 键 词：非球面 检测 DSP 伺服电机 运动控制 

分 类 号：TH741[机械工程—光学工程]