激光微加工电热微夹钳设计与FEA仿真  

Design and FEA Simulation of Electrothermal Micro Gripper with Laser Micro Fabrication

作　　者：严雪萍[1] 张慧[1] 韩庆福[1] 李俊[1] 成立[1] 徐志春[1] 刘德林[1] 

机构地区：[1]江苏大学电气与信息工程学院,江苏镇江212013

出　　处：《半导体技术》2007年第8期727-731,共5页Semiconductor Technology

基　　金：国家高技术研究发展计划(863计划)(2006AA10Z258)

摘　　要：选用厚度为12.5μm的镍箔,采用激光微加工技术制备尺寸为2.8 mm×1.4 mm×0.0125 mm的微夹钳。其每一对级联元件由一系列致动单元组成,而每个致动单元由一个制约器和两个呈半圆形的动作梁构成,其驱动原理是电热效应。运用有限元分析(FEA)仿真了微夹钳的动态性能,对其动态性能进行了实验测试。测试结果表明,当电压为1.9 V时,最大位移量达到28.8μm,延迟时间小于200 ms。A micro gripper with overall dimensions of 2.8 mm （L） × 1.4 mm （W） × 0.0125 mm （H） was produced by a nickel foil of 12.5μm thickness in the laser micro fabrication. Each cascaded structure was formed by connecting several basic actuation units in series, each actuation unit consisted of a constrainer and 2 semi-circular-shaped actuation beams. The actuation principle was based on the electrothermal effect. Finite element analysis （FEA） was applied to simulate dynamic performance of the micro gripper and some experimental tests were also done. The tests result shows that the maximum tweezing displacements is 28.8 μm and the delay time is less than 200 ms when the voltage is 1.9 V.

关 键 词：微夹钳 有限元分析 微电子机械系统 激光微加工技术 

分 类 号：N945.13[自然科学总论—系统科学]