基于压电陶瓷的MEMS测试用的多载荷加载台的研制  

PREPARATION OF MULTI-LOADING DEVICE FOR MEMS TESTING BASED ON PZT

作　　者：施阳和[1] 张鸿海[1] 汪学方[1] 

机构地区：[1]华中科技大学

出　　处：《中国陶瓷》2007年第8期34-35,13,共3页China Ceramics

基　　金：国家863计划资助项目;编号:2004AA404043

摘　　要：MEMS模态测试的一个突出的特点在于非接触性,无论是振动激励还是响应测量,都只能是非接触的。为解决MEMS测试中非接触式的振动激励问题,对基础激励的原理进行了研究,并设计开发出基于压电陶瓷的MEMS测试用的多载荷加载台。这是一个能为MEMS测试提供振动、温度和压力这三种载荷的加载装置。从而为进一步开展MEMS的动态测试工作奠定了基础。A salient feature of modal testing of MEMS is non-contact. Excitation and response measurement must be non-contact. In order to solve problem of vibrating excitation of MEMS testing, principle of base-excitation was researched. Multi-loading device for MEMS testing based on PZT（piezoelectric ceramic） which can provide vibrating and temperature and pressure load for MEMS testing has been designed. Dynamic testing of MEMS will be benefited from the device

关 键 词：微机电系统 压电陶瓷测试 多载荷加载台 设计原理 

分 类 号：TP273.2[自动化与计算机技术—检测技术与自动化装置]