飞秒激光制备阵列孔金属微滤膜  

Femtosecond Laser Processing of Arrayed Micro Holes of Metal Filtration Membrane

作　　者：杨洗陈[1] 汪刚[1] 赵友博[2] 王明伟[2] 

机构地区：[1]天津工业大学激光技术研究所,天津300160 [2]南开大学现代光学研究所,天津300071

出　　处：《中国激光》2007年第8期1155-1158,共4页Chinese Journal of Lasers

基　　金：国家教育部光电信息技术科学重点实验室(2003-2-4)资助项目

摘　　要：选用不锈钢、铜和铝三种金属薄膜作为实验材料,厚度10～50μm。对不锈钢、铜和铝三种金属薄膜进行飞秒激光加工,研究了所形成的微纳米孔直径与飞秒激光加工参数的关系。结果表明,飞秒激光加工的微孔直径随单脉冲能量和脉冲数的平方根的增大而增大。不锈钢薄膜适于飞秒激光制作金属微孔膜,在25μm厚的不锈钢薄膜上制备了大面积阵列微孔,孔直径为2.5～10μm,孔间距为10～50μm。与传统烧结金属微孔过滤膜比较,飞秒激光制备阵列微孔金属膜具有膜孔尺寸均匀一致、直通孔形、膜孔尺寸和间距可控等特点,可获得较高的孔隙率,有利于提高透过水通量。　Three metal membranes of stainless,Al and Cu with thickness of 10～50 μm are selected and processed by femtosecond（fs） laser to fabricate arrayed micro holes.The relationships between micro hole diameter and laser microprocessing parameter have been researched in detailes.The experimental results of laser drilling of stainless,Cu and Al have been examined.It is shown that the diameters of micro hole are increased with single pulse energy and pulse number.Stainless is available for fs laser micro drilling of metal filtration membrane.The straight arrayed structure micro holes with diameters of 2.5～10 μm and spaces of 10～50 μm have been achieved in stainless of depth of 25 μm.Comparing with traditional sintered metal porous membrane,the fs laser microprocessing metal filtration membrane has some excellences in uniform hole diameter,straight and arrayed hole,adjustable size and space of holes,and it is benefited to increase the hole area rates in the membrane and improve the permeated water flux.

关 键 词：激光技术 微纳加工 飞秒 金属膜 阵列孔 

分 类 号：TN249[电子电信—物理电子学]