硅基PIN光电探测器的设计与模拟  

Design and Simulation of a PIN Photo-Detector in the Monolithic Integrated Silicon Photo-Receiver

作　　者：李欢[1] 牛萍娟[1] 张宇[1] 李俊一[1] 杨广华[1] 

机构地区：[1]天津工业大学信息与通信工程学院,天津300160

出　　处：《半导体技术》2007年第9期753-756,共4页Semiconductor Technology

基　　金：国家自然科学重点基金项目(NSFC-60536030)

摘　　要：介绍了单片集成硅光接收器的研究背景,阐述了硅光电探测器的工作机理。设计了一种应用于单片集成硅光接收器的PIN结构光电探测器,并用Silvaco软件对光电探测器的器件结构、光谱响应、响应电流及其随入射光功率的变化、器件的暗电流分别进行了模拟,对模拟结果进行了分析。设计了该光电探测器的版图,给出了其主要工艺流程,搭建了其光响应谱测试电路。最后对研究结果进行了总结。The developing background of the monolithic integrated Si photo-receiver was presented, The mechanism of the Si photo-detector was discussed, A PIN photo-detector used in the monolithic integrated Si photo-receiver was designed. The structure, spectral response, response current, metabolic current depend on changed intensity and dark current of the photo-detector were simulated, the simulated results were analyzed. Layout design was accomplished, the process was presented and the spectral response testing circuits were set up, At last, all the results were summarized.

关 键 词：单片集成 光接收器 光电探测器 Silvaco 

分 类 号：TN382[电子电信—物理电子学]