基于等离子体朗缪尔流效应的新型微机械陀螺仪  

New Micromechanical Gyroscopes Based on Plasma Langmuir Flow Effects

作　　者：汪学方[1] 罗小兵[1] 艾叶[1] 刘胜[1] 张鸿海[1] 甘志银[1] 

机构地区：[1]华中科技大学,湖北武汉430074

出　　处：《仪表技术与传感器》2007年第7期20-22,共3页Instrument Technique and Sensor

基　　金：国家自然科学基金(50545012);国家"八六三"计划MEMS专项基金(2005AA404260)

摘　　要：首次将等离子体作为敏感元件应用于微机械陀螺仪中,取代目前微机械陀螺仪中所采用的固体、液体或气体等元件。利用气体放电产生的等离子体朗缪尔流效应来使敏感元件产生一定速度的运动,不需另外的驱动元件。介绍了等离子体朗缪尔流效应,探讨了应用朗缪尔流效应的新型微机械陀螺仪的原理,根据Langmuir-Drugvesteyn理论推算朗缪尔流速度可达到6 m/s,给出了该新型微机械陀螺仪的微加工与封装方案和工艺参数优化试验系统。Hasma as sensitive component in micro mechanical gyro was applied for the first time,take the place of solid, liquid or pneumatic components. Plasma Langmuir flow effect produced by gas discharge was used to make sensitive component move at a certain velocity without further drive part. The plasma Langmuir flow effect was introduced, and the fundamental of novel micro mechanical gyro using Langmuir flow effect was discussed. The calculated Langmuuir flow velocity is 6 m/s according to Langmuir-Drugvesteyn theory. The micro machining and package method of this novel micro mechanical gyro and process parameters optimize experimental system were also presented.

关 键 词：等离子体 朗缪尔流效应 陀螺仪 

分 类 号：TP216[自动化与计算机技术—检测技术与自动化装置]