光刻机模拟隔振试验装置内部世界动力学模型分析  

Model Analysis on Inner-world Dynamics for the Simulated Vibration-isolation Testing Equipment of the Stepping and Scanning Lithography

作　　者：邓习树[1] 吴运新[1] 李宝童[1] 杨辅强[1] 

机构地区：[1]中南大学机电工程学院,湖南长沙410083

出　　处：《制造技术与机床》2007年第10期77-81,共5页Manufacturing Technology & Machine Tool

基　　金：国家自然科学基金委项目重大项目课题(编号:50390064);上海市科委联合资助项目<精密机械减振隔振技术研究>

摘　　要：为给步进扫描光刻机的设计研究提供理论指导,解决光刻机掩模台、工件台由于高速运动而引起光刻机工作核心部分——工作平台的振动问题,根据工业应用中步进扫描光刻机的运动特点和工作要求,设计了一种内部世界和外部世界用精密6自由度减振器连接的步进扫描光刻机隔振试验装置;建立了内部世界6自由度的动力学模型,运用设计的参数计算出了内部世界的固有频率和对应的振型;同时运用ANSYS有限元软件进行了分析计算,两者的计算结果吻合很好,验证了动力学模型的正确性。In order to provide academic steering for the design of Stepping and Scanning Lithography and settle the vibration problems of the key part caused by the high speed motion of the wafer stage and the stencil stage, the paper designs a simulated Vibration - isolation Testing Equipment of the Stepping and Scanning Lithography that the inner - world and the outside - world are connected by precision six- degree of free vibration isolators based on its motion features and working requirements in industry. The six -degree of free of the inner - world is established, the nature frequency and the vibration mode are calculated by using the designed parameters. The paper also applies ANSYS software for calculating the nature frequency and the vibration mode of the inner - world and the results indicate that the calculated values can meet the theoretically calculated results well and validate the exactitude of the academic model.

关 键 词：光刻机 隔振 试验装置 内部世界 模型 

分 类 号：TP242[自动化与计算机技术—检测技术与自动化装置]