阳极键合电流模型的实验研究  

Model investigation on characteristic of anodic bonding current

作　　者：揣荣岩[1] 刘晓为[1] 王喜莲[1] 陈卫平[1] 刘义波[2] 

机构地区：[1]哈尔滨工业大学MEMS中心 [2]黑龙江大学电子工程学院,哈尔滨150080

出　　处：《哈尔滨工业大学学报》2007年第9期1370-1373,共4页Journal of Harbin Institute of Technology

基　　金：国家高技术研究发展计划资助项目(2003AA404014)

摘　　要：随着近年来MEMS-CAD的迅速发展,阳极键合技术作为MEMS领域的基础工艺,其模拟仿真受到了重视.本文分析现有的阳极键合电流模型产生偏差的原因,在实验基础上,给出一组定量模拟平面电极键合电流的公式.结合点电极键合的扩展模型,提出点电极键合电流的计算方法.实验证明这种方法给出的模拟公式实际反映了点电极键合电流的变化规律.Along with rapid development of MEMS - CAD in recent years, the technique of anodic bonding, qua basic craft of MEMS, is required tO be simulated. Therefore, the paper analyzed the reason for the deviation of anodic bonding current from existing model. A set of formulas used for quantitative simulation of area electrode bonding current were obtained based on experiments. Using spreading model of anodic bonding, a method was presented to calculate point cathode current. Experiments prove that the current formulas from the method practically reflect the change law of point cathode current.

关 键 词：MEMS 阳极键合 电流模型 定量关系 点阴极 

分 类 号：TN305[电子电信—物理电子学]