韧性基体上硬质涂层的扫描电镜截面样品制备方法  

A PREPARATION METHOD OF CROSS-SECTIONAL SEM SAMPLES OF HARD COATINGS ON DUCTILE SUBSTRATE

作　　者：乌晓燕[1] 戴嘉维[1] 李戈扬[1] 

机构地区：[1]上海交通大学材料科学与工程学院,上海200030

出　　处：《理化检验（物理分册）》2007年第10期512-513,539,共3页Physical Testing and Chemical Analysis(Part A:Physical Testing)

摘　　要：以不锈钢表面涂覆AlN/SiO2纳米多层涂层样品为例,介绍了一种制备韧性基体硬质涂层的截面扫描电子显微镜观察样品的方法,取得了较好的效果。Taken the preparation of stainless steel with AlN/SiO2 nano multilayered coating sample as an example, a preparation method of cross-sectional SEM sample of hard coatings on ductile substrate, was introduced, the effect was satisfactory.

关 键 词：扫描电镜截面样品 硬质涂层 韧性基体 

分 类 号：TG115.211.2[金属学及工艺—物理冶金]