160×128元多量子阱长波红外焦平面探测器件研制  

160×128 focal plane arrays of long-wavelength GaAs/AlGaAs multiple quantum well infrared photodetector

作　　者：种明[1] 苏艳梅[1] 张艳冰[2] 胡小燕[2] 马文全[1] 孙永伟[1] 陈良惠[1] 

机构地区：[1]中国科学院半导体研究所纳米光电子实验室,北京100083 [2]华北光电技术研究所,北京100015

出　　处：《红外与激光工程》2007年第5期702-704,共3页Infrared and Laser Engineering

基　　金：国家863计划资助项目(2002AA313100)

摘　　要：报道了新研制出的160×128元GaAs/AlGaAs多量子阱长波红外焦平面器件。使用MBE的方法在半绝缘的GaAs衬底上生长器件结构;开发了用普通光刻技术和离子束刻蚀法制备2D光栅技术,以及探测器芯片与读出电路互联技术。在77 K时测试,器件的平均峰值探测率Dλ*=1.28×1010 cmW-1Hz1/2,峰值波长为λp=8.1μm,截止波长为λc=8.47μm。器件的非盲元率≥98.8%,不均匀性10%。A 160×128 focal plane arrays （FPAs） of long-wavelength GaAs/AlGaAs multiple quantum well infrared photodetector （QWIP） were fabricated, The device structure was grown on a semi-insulating GaAs wafer by molecular beam epitaxy （MBE）, The 2D surface grating reflector arrays were fabricated by using the standard photolithography and ion beam etching （IBE） technologies. The interconnected technology of chip of the detector and readout circuit is studied.The measured average peak detectivity Dλ＊ of the FPAs at 77 K is 1.28×10^10 cmW^-1Hz^1/2 with the peak wavelength at 8.1 μm and the cutoff wavelength at 8.47 μm.The pixel operability of the FPAs is 98.8% or greater and the full scale nonuniformity is smaller than 10%.

关 键 词：长波红外探测器 量子阱 焦平面阵列 

分 类 号：TN362[电子电信—物理电子学]