磷化铟单晶炉用超导磁体装置的调试及实验  

The Experimental Study of the Superconducting Magnet Apparatus for InP Crystal Growth

作　　者：张丰元[1] 易昌练[1] 高广箴[1] 施锦[2] 

机构地区：[1]中国科学院电工研究所,北京100080 [2]合肥低温电子研究所,230061

出　　处：《低温与超导》1997年第1期33-37,共5页Cryogenics and Superconductivity

摘　　要：我国首台带国产制冷机的磷化铟单晶炉用超导磁体装置已研制成功。超导磁体内径φ　710mm，在坩埚区域提供0．3T以下稳定垂直磁场，沿轴向150mm内磁场均匀性优于5％，沿径向150mm内磁场均匀性小于2.6％，24小时的磁场稳定性小于0．1％。装置的室温孔径φ615mm，高430mm，外径φ1100mm。制冷机置于容器上部，装置的液氦日蒸发为0．32升／日，输完液氦后，实存50升以上，可以工作三个月，总重312kg。The superconducting magnet apparatus with Model GM205 refrigerator for InP crystal growth has been developed sucessfully.The inner diameter of the superconducting magnet is φ710mm. The magnetic field is up to 0.3 T at the crucible center. The homogeneity of the vertical magnetic field in 150mm is less than 5%. The homogeneity of the horizontal magnetic field in 150mm is less than 2. 6%. The steadiness of the magnetic field in 24 hours is less than 0.1%.The room temperature bore of the apparatus is φ615mm. The height is 430mm. The outside diameter is φ1100mm. The LHe vapour rate is 0. 32 L/day- Filling up LHe,it can contain more than 50 litres. The operating time of the apparatus is more than 3 monthes,the weight is 312kg.The experimental study of the apparatus is mainly described in this paper

关 键 词：磷化铟 单晶炉 超导磁体 单晶生长 

分 类 号：O782.9[理学—晶体学]