一种基于MEMS工艺的二维风速传感器的设计  

Design of a 2D Thermal Wind Sensor Based on MEMS Process

作　　者：沈广平[1] 吴剑[1] 张骅[1] 秦明[1] 黄庆安[1] 

机构地区：[1]东南大学MEMS教育部重点实验室,南京210096

出　　处：《Journal of Semiconductors》2007年第11期1830-1835,共6页半导体学报（英文版）

基　　金：国家自然科学基金资助项目(批准号:90607002)~~

摘　　要：给出了一种基于MEMS工艺的二维热风速传感器的设计、制造以及测试结果.该传感器采用恒功率工作方式,利用热温差的方法测量风速和风向.本传感器采用MEMS剥离工艺在玻璃衬底上同时加工出加热电阻和测温电阻,利用简单可靠的加工工艺实现了热隔离和高灵敏度.经过风洞风速风向测试,得知传感器的风速量程超过10m/s,360°范围内风向测量误差不超过8°.传感器的响应时间不超过1s,功耗为10mW.The design, fabrication,and test results of a 2D thermal wind sensor are presented. The wind sensor measures wind speed and direction by calorimetric principle in constant power mode. Heater and detector resistors are fabricated on glass substrate using a lift-off process. The fabrication is simple and reliable, and good thermal isolation and high sensitivity are achieved. The sensor can detect wind speed in the range of 10m/s and flow direction over 360° with an error of less than 8°. The response time of the sensor is less than ls,and the heat power is 10mW.

关 键 词：MEMS 剥离工艺 风速 风向 流量传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]