DC Arc Plasma Jet CVD金刚石自支撑膜的质量对物理性能的影响  

Effect of the quality of diamond film deposited by DC arc plasma jet CVD on physical properties

作　　者：郭世斌[1] 王耀华[1] 陈飞[1] 吕反修[1] 唐伟忠[1] 佟玉梅[1] 

机构地区：[1]北京科技大学材料科学与工程学院,北京100083

出　　处：《功能材料》2007年第A10期3802-3805,共4页Journal of Functional Materials

基　　金：国家自然科学基金资助项目（50572007）;博士点基金资助项目（20040008018）

摘　　要：本研究对Raman谱进行高斯（Gauss）和洛仑兹（Lorenz）分峰拟合，将金刚石自支撑膜Raman谱分成纯金刚石峰和非金刚石峰，对比两种方法的精度，结果显示高斯拟合的精度高些。运用经验公式计算出金刚石自支撑膜的质量因子，发现质量因子主要受纯金刚石峰强度和无定型碳峰强度的影响，非金刚石峰强度与质量因子成反比，纯金刚石峰强与质量因子成正比，同时还受到内应力的影响。质量因子与热导率、断裂强度和红外透过率的关系表明，金刚石自支撑膜的以上物理性能与其质量成正比关系。In this paper, the decomposition of the Raman spectra into pure diamond peak and non-diamond carbon peak allow us to characterize the diamond quality. Gauss and Lorenz were used to fit the Raman spectra. The results show Gauss has the better R^2. The quality factor calculated by empirical formula is affected chiefly on the pure diamond peak and the amorphous carbon peak. The intensity of the amorphous carbon peak decreases with the increased quality factor. The intensity of the diamond peak increases with the increased quality factor and is affected on internal stress. The relation between quality factor and physical properties shows the physical properties increasing with the increased quality factor.

关 键 词：金刚石自支撑膜 热学性能 力学性能 光学性能 

分 类 号：O736[理学—晶体学] TN305.18[电子电信—物理电子学]