光课机隔振试验平台定位系统的轨迹规划  

Trajectory Planning for Vibration Isolation Platform's Positioning System of Lithography Machine

作　　者：王建平[1] 刘矿陵[1] 杨辅强[2] 

机构地区：[1]长沙航空职业技术学院 [2]中南大学

出　　处：《工具技术》2007年第11期64-67,共4页Tool Engineering

基　　金：国家自然科学基金委项目重大项目课题(项目编号:50390064);上海市科委联合资助项目<精密机械减振隔振技术研究>

摘　　要：介绍了微制造隔振试验平台定位系统运动轨迹的规划。为了减小运动部件加减速过程中对整个平台的冲击,在进行运动轨迹规划时,采用了S形曲线对定位系统的运动轨迹进行了平滑处理,有效降低了运动部件对系统的冲击,有利于系统的减振。Kinematic trajectory planning for isolation platform＇s positioning system of Micro-manufacture is introduced in paper. In order to reduce the impulsion of the platform during the moving part accelerates or decelerates, it takes Scurve to smooth the kinematic trajectory of the positioning system. It has reduced the impact of the platform caused by the moving part availably which is benefit to the vibration reduction of the system.

关 键 词：隔振平台 轨迹规划 S形曲线 光刻机超精密工件台 

分 类 号：TN305.7[电子电信—物理电子学]