基于Parylene的柔性微电极阵列微加工工艺研究  

Study of Microfabrication Process of Flexible Microelectrodes Arrays Based on Parylene

作　　者：吴义伯[1] 侯安州[1] 倪鹤南[1] 徐爱兰[1] 惠春[2] 任秋实[2] 

机构地区：[1]上海交通大学微纳科学技术研究院微米/纳米加工技术国家级重点实验室,上海200030 [2]上海交通大学生命科学技术学院,上海200030

出　　处：《半导体技术》2007年第12期1018-1020,1036,共4页Semiconductor Technology

基　　金：国家973资助项目(G2005CB7243002)

摘　　要：基底集成的柔性微电极阵列(MEAs)从一个全新的角度演绎了植入式神经系统,对神经进行电刺激并记录神经电信号。以一种新型聚合物材料聚对二甲苯(parylene)为基底,制备出了用于神经接口的柔性神经微电极阵列。采用MEMS加工技术,设计了一种基于parylene柔性神经微电极阵列的加工工艺方法,并讨论了在流片过程中的关键问题,如掩膜层的选择、电极的剥离及焊接与封装等。该柔性微电极阵列在用于视觉假体的神经接口方面具有独特的应用优势。Substrate integrated microelectrode arrays （MEAs） offer an alternative to traditional methods for recording or stimulating the electrical activity from neural cells, A microfabrication technique was introduced to fabricate multi-electrode arrays based on a new flexible substrate, termed as parylene. This flexible polymer has a better performance than polyimide, such as biocompatibility. The key technologies were described for parylene-based neural microelectrode arrays, which were likely to be used as neural interface. The fabricated MEAs will supply a particular application with neural interface for retinal prosthesis.

关 键 词：柔性微电极阵列 聚对二甲苯 微加工工艺 神经接口 

分 类 号：TN405[电子电信—微电子学与固体电子学]