先驱硼薄膜的质量对MgB_2超导薄膜的影响  

Effect of precursor boron thin films on superconducting MgB_2 thin films

作　　者：劳振花[1] 姜兆波[1] 王殿生[2] 

机构地区：[1]东营职业学院,山东东营257091 [2]中国石油大学物理科学与技术学院,山东东营257061

出　　处：《低温工程》2007年第6期51-53,58,共4页Cryogenics

摘　　要：以高纯乙硼烷(B2H6)为B源,采用化学气相沉积(CVD)方法在多晶Al2O3衬底上沉积B薄膜,然后在Mg蒸气中异位退火来制备MgB2超导薄膜。通过X射线衍射和MgB2超导薄膜的电阻-温度曲线,研究了先驱硼薄膜的质量对MgB2超导薄膜的影响。The superconducting MgB2 thin films were prepared on Al2O3 polycrystalline substrates by a two-step ex-situ magnesium-diffusion method with the precursor boron thin films grown by CVD from B2H6. The effect of precursor boron thin films on superconducting MgB2 thin films was studied by X-ray diffraction analysis and resistance-temperature curve measurement.

关 键 词：MGB2 超导薄膜 乙硼烷 化学气相沉积 纯度 

分 类 号：TB663[一般工业技术—制冷工程] O514.2[理学—低温物理]