ZnO气敏薄膜的实用化——一种新的气敏基材料  

Practicality of ZnO gas sensing thin film-a new gas sensor basic material

作　　者：黄少艳[1] 邢建平[1] 李长庆[1] 徐勇[2] 裘南畹[3] 

机构地区：[1]山东大学信息科学与工程学院,山东250100 [2]山东大学水电中心,山东250100 [3]山东大学纳米薄膜电子功能材料实验室,山东250100

出　　处：《功能材料与器件学报》2007年第6期640-644,共5页Journal of Functional Materials and Devices

基　　金：国家自然科学基金(No.60372030);山东省火炬计划项目(No.111600/04040214)

摘　　要：ZnO薄膜是最早发现有良好气敏特性,并且也是最早(1962)被提出用它来研制气敏元件的金属氧化物气敏基材料;然而近半个世纪以来没有实现。最近通过用粉末溅射解决气敏层的掺杂稳定性;通过选择合适的绝缘衬底(Al_2O_3)和适当选择溅射参数得到掺杂稳定,结构稳定,性能良好的ZnO薄膜酒敏元件。通过对芯片和接线柱的超声双点焊获得超小型悬挂式的气敏元件,并用它做出可检测100ppm和500ppm两种酒气浓度的报警器。The ZnO thin film is the earliest discovered with fine gas sensing characteristics and is the earliest put forward to develop gas sensor basic material. However, it has not come true in the recent half century. Recently, we have solved the doping impurity stability by powder sputtering, and solved the structure stability by selecting proper substrate （Al2O3 ） and sputtered parameters, such that a kind with doping impurity stability, structure stability, better gas sensing characters yielded. We can acquire microminiature pensile gas sensor by double point welding the chip and wiring pole, and make out the alarm which can detect alcohol gas concentration between 100ppm and 500ppm.

关 键 词：ZNO薄膜 粉末溅射 双点焊 

分 类 号：TB383[一般工业技术—材料科学与工程]