静电梳驱动RF MEMS滤波器动力学分析  

Dynamic Analysis of RF MEMS Filters Excited by Electrostatic Comb

作　　者：孙玉国[1] 

机构地区：[1]上海理工大学光学与电子信息学院精密仪器研究所,上海200093

出　　处：《噪声与振动控制》2007年第6期134-135,共2页Noise and Vibration Control

基　　金：上海市教委科研资助项目(06EZ018)

摘　　要：静电梳驱动硅微机械滤波器在RF通信领域有重要应用。从振动力学的角度,对硅微机械滤波器的力电耦合动态特性进行分析。分析结果表明:硅微机械滤波器输出电压V_o(t)与梳状振子振动速度成正比。谐振状态下,静电力包含直流分量和倍频分量。直流偏置电压V_p可消除系统倍频振动,为后续检测电路设计提供便利。An electronic-mechanics dynamic coupled model for a RF MEMS filter excited by Electrostatic comb was established. The transfer function of the system was derived. The bias voltage Vp was discussed especially. The theoretical analysis results show that the output voltage of the RF MEMS filter is proportional to the vibrating velocity of the static comb equipment. The bias voltage Vp can remove the double frequency vibration of the input signal, which is of benefit to the detecting circuit design.

关 键 词：振动与波 机械滤波器 偏置电压 微机电系统 

分 类 号：TN731[电子电信—电路与系统]