可重构的低温共烧陶瓷电容高频等效电路模型  

Reconstructed High Frequency Equivalent Circuit Model for LTCC Capacitor

作　　者：李小珍[1] 邢孟江[1] 朱樟明[1] 李跃进[1] 杨银堂[1] 

机构地区：[1]西安电子科技大学微电子研究所,西安710071

出　　处：《半导体技术》2008年第1期83-85,共3页Semiconductor Technology

基　　金：国家重大科技预研资助项目(51323030301)

摘　　要：低温共烧陶瓷电容元件在微波多芯片组件设计中具有重要地位,其模型是系统仿真的关键。根据电容的物理结构特点,提出了一个可重构的高频电容模型,并给出其模型参数的计算公式。最后用ADS对双层电容和四层电容等效电路模型的S参数和用三维电磁场仿真软件的仿真结果做了对比,结果表明,其双层电容等效电路模型可以准确到4 GHz,其四层电容等效电路模型可以准确到2 GHz。采用等效电路的仿真时间比三维电磁场仿真软件约快60倍。LTCC （low temperature co-fired ceramics） capacitor is very important in the design of microwave multi-chip module （MCM） which is a crucial step for system simulation. The reconstructed high frequency capacitor model was established and the calculative formulas of this model parameters were given. The equivalent circuit model based on two-layer and four-layer capacitor S parameters in ADS was compared with the result of 3 D electromagnetic filed simulation software, which indicates that two-layer model of the equivalent circuit can be accurate to 4 GHz, and the four-layer model of the equivalent circuit is 2 GHz, the equivalent circuit simulative time is 60 times more than that of 3 D electromagnetic filed simulation software.

关 键 词：低温共烧陶瓷 电容 等效电路 模型 

分 类 号：TB34[一般工业技术—材料科学与工程] TN402[电子电信—微电子学与固体电子学]