热键合制作Yb：Y3Al5O12／Y3Al5O12复合晶体  

Composite Yb:Y_3Al_5O_(12)/Y_3Al_5O_(12) Crystal Prepared by Thermal Bonding

作　　者：王晓丹[1,2] 赵志伟[1] 王静雅[1] 徐军[1] Gilbert Bourdet J．-C．Chanteloup 

机构地区：[1]中国科学院上海光学精密机械研究所,上海201800 [2]中国科学院研究生院,北京100049 [3]Ecole Polytechnique, Laboratoire pour l＇Utilisation des Lasers Intenses, Route de Saclay, Palaiseau 91128, France

出　　处：《无机材料学报》2008年第1期125-129,共5页Journal of Inorganic Materials

基　　金：国家高技术研究发展计划(863计划)(2002AA311030);上海市国际科技合作基金(065207062);中法先进研究计划

摘　　要：采用热键合技术制备了Yb:Y_3Al_5O_(12)/Y_3Al_5O_(12)(Yb:YAG/YAG)复合晶体,对复合晶体进行了结构表征和键合质量检测.利用光学显微镜和扫描电镜观察了复合晶体横截面的形貌;在偏光显微镜下观察键合区域的应力,利用干涉条纹来表征复合晶体的光学均匀性;通过红外透过光谱的测量来检测复合晶体的键合质量.实验结果表明:热键合技术制备的Yb:YAG/YAG复合晶体键合界面处无界面缺陷,不存在复合界面空间过渡层,光学均匀性良好.The composite Yb：Y3Al5O12/Y3Al5O12 crystal was made by thermal bonding method. Structure and bonding quality of composite crystal were characterized in detail. The cross section of the composite crystal was observed by optical microscope and scanning electron microscope （SEM）, the stress in bonding area was observed by micropolariscope; optical homogeneity of the composite crystal was characterizated by interference fringe; bonding quality of the composite crystal was also studied by infrared transmission spectra. All experiments show that the composite Yb：YAG/YAG crystal has no interface defects, and no space transition layer in bonding area. The composite crystal has good optical homogeneity.

关 键 词：Yb:YAG/YAG 键合质量 应力 光学均匀性 热键合 

分 类 号：TN244[电子电信—物理电子学]