热压硫化锌基底上类金刚石膜的设计与实现  

Design and Depositing of Diamond-like-CarbonOn Hot-press ZnS-sub

作　　者：洪伟[1] 赵友博[2] 张铁群[2] 隋承林 

机构地区：[1]航天科工集团三院8358所,天津300092 [2]南开大学现代光学研究所光电信息技术科学教育部重点实验室,天津300071 [3]天津市道路桥梁管理处机械修理厂,天津300220

出　　处：《光电技术应用》2007年第6期41-44,共4页Electro-Optic Technology Application

基　　金：光电信息技术科学教育部重点实验室资助项目(2005-19)

摘　　要：讨论了在ZnS窗口和整流罩上实现DLC膜的方法，给出了膜系和实验结果．从测试结果可以看出。ZnS基片、Si膜和DLC膜在7-10μm的平均透过率比以往的双面减反射膜有了明显的提高，不仅满足了技术指标的要求，而且也有利于DLC膜应用领域的进一步拓展．The method of depositing Diamond-like-Carbon on ZnS-substrate was discussed, and the corresponding experimental results were given. Based on analysis of coating samples, we demonstrated that average transmittances of ZnS-sub, Si-coating, DLC for wavelengths between 7--10μm had been improved significantly compared to the old double-coated anti-reflecting film. This not enhance the development of applications of DLC. only satisfied technical requirements, but also could

关 键 词：硫化锌 类金刚石膜 化学气相沉积 热压 射频等离子放电法 

分 类 号：TQ129[化学工程—无机化工] TB43[一般工业技术]