溶胶-凝胶法制备BST铁电薄膜的实验教学  

Fabrication of BST Ferroelectric Thin Films by Sol-gel Method

作　　者：胡文成[1] 董东[1] 侯高垒[1] 沈怡东[1] 何为[1] 

机构地区：[1]电子科技大学微电子与固体电子学院应用化学系,成都610054

出　　处：《实验科学与技术》2007年第6期125-128,141,共5页Experiment Science and Technology

摘　　要：详细介绍了物理化学创新实验——溶胶-凝胶法制备钛酸锶钡(BST)铁电薄膜实验的实验原理、步骤,并采用XRD和AFM对不同温度下的BST薄膜进行了表征。实验结果表明,将科研项目开设为创新实验,激发了学生对实验的兴趣、培养学生的创新意识与综合能力,物理化学实验教学的内容与方式也呈现领域、学科之间的融合和综合的趋势。The experimental principle and processes of fabrication of BST thin ferroelectric films by sol - gel method, an innovative experiment of physical chemistry, have been discussed in details. The BST thin films prepared under different temperatures have been characterized by XRD and AFM. The result of the innovative experiment from scientific research project shows that this experiment stimulates the students to do experiments out of interests and arouses the students＇innovative consciousness and their comprehensive research abilities. It is also shown that the tendency in the crossover and comprehension between different disciplines in the contents and the methods of experiment teaching has increased.

关 键 词：物理化学 创新实验 溶胶-凝胶法 铁电薄膜 创新意识 

分 类 号：G642.423[文化科学—高等教育学] O64[文化科学—教育学]