一种新型力平衡扭摆式硅MEMS角加速度传感器  

Pendulous micromechanical silicon angular accelerometer with force feedback

作　　者：李建利[1] 房建成[1] 盛蔚[1] 

机构地区：[1]北京航空航天大学仪器科学与光电工程学院,北京100083

出　　处：《仪器仪表学报》2008年第1期73-78,共6页Chinese Journal of Scientific Instrument

基　　金：国防基础科研基金(D1210060013);新世纪人才项目(NCET-04-0162)资助

摘　　要：在很多控制、监测和导航系统中,不仅需要角位移和角速度信息,同时还需要角加速度信息,为了测量角加速度信息,首次提出了一种力平衡扭摆式硅MEMS角加速度传感器,采用具有大扭转惯量的扭摆式活动极板作为敏感元件,长方形金属电极板作为电容式变换器,静电力实现力平衡反馈回路,文中介绍了扭摆式硅MEMS角加速度传感器的结构及原理,详细推导出传感器的动力学方程和灵敏度,仿真结果验证了理论模型的正确性,传感器灵敏度达到0.388 9 V.(r.s-1)-1。该传感器具有体积小、质量轻、功耗小、零偏稳定性好、噪声小等优点。In order to provide angular acceleration information for various control, monitor or navigation system, this paper presents a kind of pendulous micromechanical silicon angular accelerometer with force feedback, which might be proposed by us first, as a sensor to detect angular acceleration. It composes of sensitive element, capacitive trans-ducer and electrostatic force feedback loop. The structure and operation principle of the sensor are introduced in detail. The kinetic equation and sensitivity of the sensor are given. Simulation result verifies the accuracy of the theoretic model. The sensitivity of the sensor is 0. 388 9 V ·（r·s^-1）^-1.The sensor features small bulk, light weight, low power consumption, good zero offset stability, low noise and etc.

关 键 词：MEMS 角加速度传感器 扭摆式 静电力反馈 电容式变换器 

分 类 号：U666.1[交通运输工程—船舶及航道工程] V241.6[交通运输工程—船舶与海洋工程]