256元InGaAs线列红外焦平面及扫描成像  

256 ELEMENT InGaAs LINEAR IR FOCAL PLANE ARRAY AND SCANNING IMAGE

作　　者：吕衍秋[1] 韩冰[1] 白云[1] 徐萌[1] 唐恒敬[1] 孔令才[1] 李雪[1] 张永刚[2] 龚海梅[1] 

机构地区：[1]中国科学院上海技术物理研究所 [2]中国科学院上海微系统与信息技术研究所,上海200050

出　　处：《红外与毫米波学报》2008年第1期7-11,共5页Journal of Infrared and Millimeter Waves

基　　金：国家自然科学基金重点资助项目(50632060)

摘　　要：报道了用分子束外延(MBE)方法生长掺杂InGaAs的PIN InP/InGaAs/InP外延材料,通过台面制作、硫化处理、ZnS/聚酰亚胺双层钝化、电极生长等工艺,制备了256元正照射台面InGaAs线列探测器,278K时平均峰值探测率为1.33×1012cmHz1/2W-1.测试了不同钝化方式探测器典型I-V曲线和探测率,硫化可以减小探测器暗电流,ZnS/聚酰亚胺双层钝化效果最好.并对ZnS/聚酰亚胺双层钝化InGaAs探测器进行了电子辐照研究.256元InGaAs探测器阵列与两个CTIA结构128读出电路互连并封装,在室温时,焦平面响应率不均匀性为19.3%.成功实现了室温扫描成像,图像比较清晰.Based on doped-InGaAs MBE-grown PIN InP/InGaAs/InP epitaxial materials, 256 element front-illuminated mesa InGaAs linear detectors was made by using the technics of mesa-making, sulfidation treatment, passivation with ZnS/ polyimide double layers, and growth of electrode. The mean peak detectivity of the detectors is 1.33×10^12 cmHz^1/2W^-1 at 278K. The typical I-V curves and detectivity of detectors with different passivation layers were measured. Sulfidation can reduce the dark current of detectors. The effect of passivation with ZnS/pelyimide double layers is best. InGaAs detectors passivated with ZnS/polyimide double layers after electron radiation were also studied. 256 element InGaAs detector array was connected with two CTIA-structure L128 read out integrate circuits and packaged. The mean ununiformity of responsivity is 19.3% at room temperature. Better image is achieved successfully by scanning technology at room temperature.

关 键 词：探测器 焦平面 INGAAS 钝化 扫描成像 

分 类 号：TN21[电子电信—物理电子学]