微米纳米科学技术发展及产业化启示  

Inspiration on Development and Industrialization of Micro/Nano Science and Technology

作　　者：丁衡高[1] 朱荣[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《纳米技术与精密工程》2007年第4期235-241,共7页Nanotechnology and Precision Engineering

摘　　要：近年来,微米纳米科学技术发展迅速,在产业化方面已经取得了不少进展.本文从发展现状和趋势上,结合我国具体情况,阐述了以下观点:开展创新工艺和设计方法研究,提高微机电(MEMS)应用和产业化能力;开展基础研究,提高MEMS器件和系统的水平;加强微米/纳米科学技术成果的结合.最后对今后研究工作提出了建议.With development of mico/nano science and technology, great progresses are made in industrialization as well. Some viewpoints were presented in this paper according to Chinese current status and trend in development： motivate studies on innovative fabrication and design to enhance our capability on application and industrialization of micro-electro-mechanical system （MEMS） ; motivate fundamental research for improving the level of component and system of MEMS; motivate the integration of micro/nano science and technology. Finally, some advice were given for the future works.

关 键 词：微机电系统 纳米科技 发展现状与趋势 

分 类 号：TB383.1[一般工业技术—材料科学与工程]