亚波长金属光栅偏振器设计  

Design of the Sub-Wavelength Wire-Grid Polarizers

作　　者：孟凡涛[1] 褚金奎[1] 韩志涛[1] 赵开春[1] 

机构地区：[1]大连理工大学精密与特种加工教育部重点实验室

出　　处：《纳米技术与精密工程》2007年第4期269-272,共4页Nanotechnology and Precision Engineering

基　　金：国家重点基础研究发展计划(973)项目(2006CB300407)

摘　　要：针对仿生微纳导航传感器敏感波段380～520nm的要求，基于严格耦合波理论，设计了一种适用于蓝紫光波段的金属光栅偏振器，并应用等效介质理论直观地分析了金属光栅偏振器的工作原理．所设计的金属光栅偏振器与传统的金属光栅偏振器的不同之处在于：在基底和金属线栅之间增加了氟化镁薄膜，并且刻蚀一部分氟化镁薄膜．在垂直入射条件下，在整个可见光波段，金属光栅偏振器TN透射效率大于61．5％，消光比大于370；数值计算和理论分析表明，所设计的金属光栅偏振器是一种宽带宽、高TN透射效率和高消光比的偏振器件．According to the requirement of the sensitive wave band of 380---520 nm of the bionic micro-nano navigation sensor, a wire-grid polarizer, which is applicable for blue-violet light spectrmn, was designed based on rigorous coupled-wave theory, and its behavior was analyzed with effective medium theory . The difference between the designed and conventional wire-grid polarizers is that the former adds the magnesium fluoride film between the substrate and the wire-grid, and etches a portion of the magnesium fluoride film. When wire-grid polarizer works in normal incidence its TM polarization transmission efficiencies are more than 61.5 %, and the extinction ratios are more than 370 in all visible light spectrtan. Numerical results and theoretical analysis show that the designed wire-grid polarizer is a polarizer with wide band, high TM polarization transmission efficiencies and high extinction ratios.

关 键 词：亚波长光栅 金属光栅偏振器 严格耦合波理论 等效介质理论 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]