激光微区等离子体光谱测定铁电薄膜材料组份的元素比率  

Determination Rate of Elements in Ferroelectric Thin Film by Laser-Microprobe Plasma Spectrum

作　　者：冯强[1] 怀素芳[1] 张雷[1] 赵敬伟[1] 郭庆林[1] 刘保亭[1] 

机构地区：[1]河北大学物理科学与技术学院,河北保定071002

出　　处：《应用激光》2008年第1期16-18,共3页Applied Laser

基　　金：973前期研究专项基金(2007CB616910);河北省自然科学基金(A2004000127)

摘　　要：本文在常压空气环境下,以单脉冲YAG激光作为激发源,通过辅助电极激发,获得了铁电薄膜样品上不同位置处的等离子体发射光谱。利用最小二乘法对铁电薄膜样品中Co、Sr和La的光谱数据进行处理,得到了元素谱线辐射强度比和原子个数比之间的线性因子Kij,并利用线性因子Kij计算了铁电薄膜上不同位置处的元素比率。结果表明,激光微区等离子体光谱法可以用于测定亚微米薄膜材料中的元素比率。In the air at normal pressure, with the single-pulse YAG laser as the excitation source, by the auxiliary electrode, we acquire the spectral intensity of different parts of the ferroelectric thin film. After the measurement of spectrum intensity from analyzed elements Co, Sr and La in the ferroelectric thin film, the spectral data are processed with the least square method, and the linear factor Kij between the elements spectrum intensity rate and atom number rate of the elements is processed. The elements rate of different parts of the ferroelectric thin film is processed with the linear factor Kij. The result shows that laser-microprobe-plasma spectrum can be used to analyze the rate of different elements in sub-micron ferroelectric thin films.

关 键 词：激光微区等离子体光谱 铁电薄膜 线性因子 

分 类 号：TN304.9[电子电信—物理电子学] TS207.51[轻工技术与工程—食品科学]