微间隙液体粘性阻力分析  

Analysis of Fluid Adhesive Resistance in Micro-gap

作　　者：戚伟俊[1] 沈雪瑾[1] 侯利程[1] 吴文蕾[1] 李科委[1] 

机构地区：[1]上海大学机械自动化系,上海200072

出　　处：《功能材料与器件学报》2008年第1期121-124,共4页Journal of Functional Materials and Devices

基　　金：国家自然科学基金重点项目(No.50135040)

摘　　要：微谐振器是微机电系统中应用最广泛的器件之一,由于加工工艺和环境潮湿等原因,在微间隙结构中常常会有液体存在,从而产生液体粘性阻力,对可动部件的运动、微器件性能的发挥产生影响。通过液体粘性阻力的分析,建立了上平板做简谐振动的微间隙液体粘性阻力模型,进行了理论计算及仿真分析。结果表明:液体粘性阻力随着平板振动的频率、最大振动速度、流体密度、流体动力粘度以及平板面积的增大而增大,而仿真分析得出的边界层厚度和流体对平板的剪切应力与理论值基本符合。The micro -resonator is one of the most widely used devices in MEMS. But the fluid always exists in the micro - gap between structures for the process procedure and the wet environment. So the fluid adhesive resistance occurs and affects the movement of movable parts and the performance of the micro -instrucments. Then the model of the micro - gap fluid adhesive resistance which the upper plate does harmonic vibration is established in this paper. Both the theoretical calculation and simulation analysis are done. The result shows that the fluid adhesive resistance increases along with the increase of the plate vibration frequency, the maximum vibration velocity, the fluid density, the hydrodynamics viscosity and the plate area. The thickness of the boundary lay and the shear stress of the fluid on the plate solved by the simulation analysis are approximate to the theoretical values.

关 键 词：微机电系统 微间隙平板 液体粘性阻力 

分 类 号：TH703[机械工程—仪器科学与技术] O441[机械工程—精密仪器及机械]