双模态超声波电机小波驱动的测量与控制  

Measurement and Control of Bimodal Ultrasonic Motor Based on Wavelet Actuation

作　　者：徐从裕[1] 余晓芬[1] 

机构地区：[1]合肥工业大学仪器科学与光电工程学院,安徽合肥230009

出　　处：《应用科学学报》2008年第2期199-203,共5页Journal of Applied Sciences

基　　金：国家自然科学基金(No.50775063);国家自然科学基金重大国际合作(No.50420120134);"现代测试与制造质量"安徽省高等学校省级重点试验室;合肥工业大学研究生科技创新基金(No.101-038901)资助项目

摘　　要：针对双模态USM在微纳米测控领域中的应用特点,设计单一的小波驱动模式代替现有的组合驱动模式.一个小波驱动波由8个39.6 kHz的正弦电压驱动波组成,其最高触发频率为5 kHz.小波驱动模式实现了双模态USM步距可调的步进控制功能.在定位控制应用中,选用栅距为20μm的光栅作为位置反馈传感器,采用作者研制的互补函数快速细分算法作为光栅纳米位移测量工具.在测量与驱动顺序控制条件下,双模态USM的最大驱动步距为2μm,工作台的最高驱动速度为10 mm/s.试验表明,选择适当的小波驱动参数,工作台可以获得纳米量级的驱动分辨率和定位精度.At present, bimodal ultrasonic motor （USM） applied to large displacement actuation and nanometer positioning control uses combination control of the actuation＇ s modes, namely AC actuation mode, pulse actuation mode and the DC actuation mode. This paper proposes a novel single wavelet actuation pattern of bimodal USM, which can realize step control with the stepping distance adjusted. A wavelet actuation wave is composed of 8 sinusoidal voltage waves of 39.6 kHz, whose maximum triggering frequency is up to 5 kHz. In a positioning control application, the grating with 20 μm pitch was selected as the displacement measurement sensor. The fast subdivision formula of mutual compensation functions developed by the author was used as the grating nanometer measurement tool. With the control algorithm of measurement and actuation sequence, the maximum stepping distance of bimodal USM was 2μm and the maximum actuation speed of the stage reached 10 mm/s. The experimental results indicate that when the wavelet actuation parameters are properly chosen, nanometer actuation resolution and nanometer positioning accuracy can be reached.

关 键 词：双模态USM 小波驱动 步进距 光栅测量 分辨率 定位控制 

分 类 号：TM384[电气工程—电机]