键合界面对面发射激光器光与热性质的影响  

Influence of fused interface on the optical and thermal characteristics of vertical cavity lasers

作　　者：何国荣[1] 郑婉华[1] 渠红伟[1] 杨国华[1] 王青[1] 曹玉莲[1] 陈良惠[1] 

机构地区：[1]中国科学院半导体研究所,北京100083

出　　处：《物理学报》2008年第3期1840-1845,共6页Acta Physica Sinica

基　　金：国家重点基础研究发展规划项目(批准号:2003CB314902);国家博士后科学基金(批准号:20060400488)资助的课题~~

摘　　要：通过界面有效吸收系数的计算及界面对腔模的反射率的影响可知,采用双面键合技术制备面发射激光器应使键合界面处于驻波场分布零点位置,同时界面厚度应该小于20nm以使器件光学性能受界面吸收系数的影响较小.采用有限元方法分析VCSEL温度分布,结果证实薄的键合界面使VCSEL有源区温度对界面的热导率和电导率改变不敏感,而厚的键合界面将可能使有源区温度有较大地升高,给器件带来严重的不良影响.亲水键合和疏水键合的SEM照片说明疏水处理界面较薄,适合用于器件的制备.而亲水处理界面厚度>40nm,对器件的光、热特性不利.From the effective absorption coefficient of bonded interface and the relationship of interface to reflectivity at cavity mode for double bonded vertical cavity laser, it can be seen that bonded interfaces should be positioned at the null of standing wave distribution, and the thickness of interface should be less than 20 nm. Using the finite elements method, the temperature contour map of laser can be calculated. Results showed that the influence of thin interface to thermal characteristics of VCSELs is slight, while thick interface will lead to temperature increase of active region. SEM images demonstrate that hydrophobic bonding is suitable for the fabrication of the device, while hydrophilic bonding interface is unfavorable to optical and thermal properties of devices with interface thickness larger than 40 nm.

关 键 词：面发射激光器 热导率 电导率 键合界面 

分 类 号：TN248[电子电信—物理电子学]