超声微细电铸试验研究  

Experimental Research on Microelectroforming with Ultrasound Stirring

作　　者：明平美[1] 朱荻[2] 胡洋洋[2] 曾永彬[2] 

机构地区：[1]河南理工大学,焦作454000 [2]南京航空航天大学,南京210016

出　　处：《中国机械工程》2008年第6期644-647,共4页China Mechanical Engineering

基　　金：江苏省自然科学基金资助项目(Bk2004214)

摘　　要：试验研究和分析了电解液施加超声搅拌作用时不同声强对试样形貌质量的影响，优选了工艺参数，在此基础上，进行了超声微结构电铸试验，并制备出多种金属微器件。试验结果表明：超声搅拌声强为12～14W／cm^2时，电铸出的镍微器件积瘤、针孔等缺陷少，塌角、圆边现象明显减少，表面平整。微细电铸时，电解液施加适量大小声强的超声搅拌，能显著改善微细电铸器件形貌质量，提高金属充填能力。A number of microelectroforming experiments assisted with ultrasound stirring were carried out to verify and revise the optimum processing parameters,and some metal microdevices were produced. Experimental results show that fewer microdefects such as nubbles, pinholes,roundings,and collapses in the microelectroforms and smoother surface are observed when ultrasound stirring with power intensity 12W/cm^2-14W/cm^2 is drawn on. Microelectroforming assisted with ultrasound stirring at appropriate power intensity is characterized by better topograhpy and better uniform filling behavior.

关 键 词：超声搅拌 微细电铸 微器件 微观形貌 

分 类 号：TM56[电气工程—电器]