外差激光干涉仪非线性的细分和消除  

Subdivision and Elimination of Nonlinearity in Heterodyne Interferometers

作　　者：侯文玫[1] 王俊[1] 

机构地区：[1]上海理工大学光电学院,上海200093

出　　处：《计量学报》2007年第3期210-215,共6页Acta Metrologica Sinica

基　　金：国家自然科学基金(50675141);上海市重点学科建设项目(T0501)

摘　　要：通过理论推导得到一个消除外差激光干涉仪非线性的理论,只要改变干涉仪的结构,也就是增加光程倍数,就可以减小激光干涉仪的非线性误差。实验证明,这个方法可以有效地减小双频激光干涉仪的各种非线性误差,不论这个误差是一阶的还是二阶的,也不论是什么原因引起的。它不仅适应于科学实验研究,而且也适应于工业精密测量应用,对纳米测试技术的发展具有实际意义。An interesting and significant approach is found to decrease the nonlinearity for heterodyne inlerferometers. The theoretical and experimental investigations show that it can efficiently reduce the nonlinearity of heterodyne interferomeler, whether this error is in the first order or the second order, even if it is caused by any reason. This method can be used in scientific research and is especially suitable for the industrial precision measurement, thus it has practical meaning for the development of nanomeasurement.

关 键 词：计量学 外差干涉仪 非线性 混频 

分 类 号：TB921[一般工业技术—计量学]