基于MEMS技术的微波滤波器研究进展  

Review on MEMS Microwave Filters

作　　者：欧阳炜霞[1] 张永华[1] 王超[1] 郭兴龙[1] 赖宗声[1] 

机构地区：[1]华东师范大学微电子电路与系统研究所,上海200241

出　　处：《微纳电子技术》2008年第4期214-218,234,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金(60676047);上海-应用材料研究发展基金(06SA11)

摘　　要：基于MEMS技术的滤波器是现行RF结构中一个关键的MEMS器件。与传统的采用金属矩形或圆柱波导以及半导体元件制作的滤波器相比,MEMS滤波器具有低损耗、高隔离度、线性好、体积小、易于集成等优点。对利用MEMS技术制作的滤波器做了分类总结,综述了近几年MEMS滤波器的研究进展,包括硅体微加工滤波器、LIGA传输线型滤波器和基于MEMS开关/电容实现的可调滤波器。指出可调滤波器的开发适应微波、毫米波波段的多频段、宽带无线通信系统的迫切需要,具有重要的现实意义。Filters based on MEMS technology are important devices in current RF systems. Compared with traditional microwave filters utilizing metallic rectangular/circular waveguides or semiconductor components, MEMS filters have advantages including low loss, high isolation, excellent linearity, small size, easy integration, etc. Filters based on MEMS technology are classified and summarized. The research progresses of MEMS filters over the past several years are presented, including silicon bulk micromachining, LIGA transmission lines and MEMS-switches/capacitors-based tunable filters. The developments of tunable filters have more interest as they meet the urgent demand of modern microwave/millimeter-wave multiband, wide-band communication systems.

关 键 词：MEMS技术 硅体微加工 UGA技术 微波滤波器 可调滤波器 

分 类 号：TN713[电子电信—电路与系统] TH703[机械工程—仪器科学与技术]