新型三轴MEMS热对流加速度传感器的研究  

Research on a Novel MEMS 3-Axial Convective Accelerometer

作　　者：吕树海[1] 杨拥军[1] 徐淑静[1] 徐爱东[1] 徐永青[1] 

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051

出　　处：《微纳电子技术》2008年第4期219-221,共3页Micronanoelectronic Technology

基　　金：国家高技术研究发展计划资助项目(04Z3)

摘　　要：介绍了一种基于热流原理的新型三轴MEMS热对流加速度传感器,它没有活动质量,无需多个器件组合就可以进行任意方向的加速度信号测量。分析了该器件的工作原理,设计了器件结构,进行了工艺开发,加工出了原理样机。测试表明:该器件实现了三个轴向的加速度信号的检测性能,验证了新原理的可行性;测量量程达到±2g,分辨率达到1mg,抗冲击能力达到10000g,具备了良好的性能。A novel 3-axial MEMS accelerometer was presented based on the principle of heat convection, which can measure acceleration in X, Y, Z axis simultaneously without muti-sensor assembling. The device does not need a proof mass. The working principle of the device was analysed. The structure was designed based on CAD simulation. The prototype was successfully developed. Test results show that the accelerometer can realize the detection of acceleration in 3-axial directions, and that it is excellent in performance with a measurement range of ±2 g, a resolution of 1 rag, and a shock resistivity of 10 000 g.

关 键 词：微电子机械系统 三轴 对流场 加速度 传感器 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]