ZnO薄膜声表面波型SF6气体传感器的研究  

SF_6 Gas Sensor for Surface Acoustic Wave Device Based on ZnO Films

作　　者：朱长纯[1] 陈文会[1] 文常保[1] 

机构地区：[1]西安交通大学电子与信息工程学院,西安710049

出　　处：《西安交通大学学报》2008年第4期445-449,461,共6页Journal of Xi'an Jiaotong University

基　　金：国家自然科学基金资助项目(60476037,60176020);教育部高等学校博士学科点专项科研基金资助项目(20020698014)

摘　　要：提出了一种基于ZnO薄膜的声表面波型SF6气体传感器.将利用微乳液法制备的ZnO颗粒制作在声表面波器件上,形成了一种对SF6气体具有物理吸附和脱吸附作用的ZnO薄膜.应用小波函数加权的输入换能器和具有抑制体声波作用的多条耦合器到声表面波器件中,传感器的频率响应特性得到了提高.声表面波器件的双声路结构消除了因外界测量条件改变引起的测量误差,进一步提高了传感器的可靠性和准确性.实验结果表明,基于ZnO薄膜的声表面波型SF6气体传感器具有较好的重复性和较强的连续测量特性,在测量范围内对各种浓度的SF6气体具有好的响应特性,传感器在φ(SF6)为0.5×10-6到20×10-6范围内的线性灵敏度大约为7.3 kHz/10-6,但对CO2、N2具有一定的交叉灵敏度.A novel scheme of SF6 gas sensor for surface acoustic wave device based on ZnO films is proposed. ZnO particles prepared by microemulsion method is fabricated on the acoustic track of surface acoustic wave device, where the ZnO films enable to absorb and desorb SF6 gas physically. The input interdigital transducer apodized by wavelet function and bulk acoustic wave suppressed by multistrip coupler are adopted in SF6 gas sensor for surface acoustic wave device based on ZnO films, thus the frequency response performances are ameliorated. The dual track receiving structure is incorporated into the sensor, thus the environment disturbance quantities for measurement signal are eliminated, and the reliability and veracity are further improved. The experimental results confirm that the SF6 gas sensor for surface acoustic wave device based on ZnO films is endowed with better reproducibility, and excellent response performance for different concentration SF6 gas in the measurement range, and the linearity sensitivity reaches to 7. 3 kHz/ 10^-6 from 0. 5×10^-6 to 20×10^-6. The sensor can continuously work, but has intersectant sensibility for CO2 and N2.

关 键 词：ZNO薄膜 声表面波器件 SF6气体 气体传感器 

分 类 号：TN65[电子电信—电路与系统] TP212[自动化与计算机技术—检测技术与自动化装置]