环境温度对气流式角速度传感器灵敏度的影响  

Effect of environmental temperature on the sensitivity of the airstream style angular velocity sensor

作　　者：朴林华[1] 王义[1] 刘玉洁[1] 宋佳[1] 张福学[1] 

机构地区：[1]北京信息工程学院传感技术研究中心,北京100101

出　　处：《电子元件与材料》2008年第4期14-16,共3页Electronic Components And Materials

基　　金：国家自然科学基金委员会资助项目(No.60772012);北京市教委面上资助项目(No.KM00710772009);北京市属高校"学术创新团队计划"资助项目;北京市优秀人才培养资助项目(No.20061D0500700169);北京市传感器重点实验室资助项目(No.KM200710772021);北京市属市管高校人才强教计划资助项目

摘　　要：采用有限元方法,计算了不同温度下敏感元件内的温度场和流场。结果表明:在输入恒定角速度时,敏感元件内的温度场和流场随环境温度发生变化,温度增加,在两个检测热电阻丝处的气流速度之差减小,检测电桥输出电压减小,传感器灵敏度降低;温度下降,在两个检测热电阻丝处的气流速度之差增加,检测电桥输出电压增加,传感器灵敏度增加。当输入角速度为20°/s时,传感器的灵敏度随温度平均变化率为0.0336mV/(°)·s–1·℃–1。The temperature and fluid field in the sensing element with different environmental temperatures were calculated by the Finite Element Method. The results are as follows： in a constant input of angular velocity, the temperature field and the stream field in sensing element of the sensor change in different environmental temperature; with the increase in temperature, airflow rate in sensing element declines wholly, conversely, with the environmental temperature decreases, airflow velocity in sensing element increases wholly; with the increase in temperature, detection bridge＇s output voltage decreases, the sensitivity of the sensor lowers; conversely, with the environmental temperature decreases, the airflow velocity difference of detection of two thermal resistance wire increases, detection bridge＇s output voltage increases. The sensitivity of sensor increases. The sensitivity of the sensor with an average temperature change rate is0.0336mV/（°）·s^-1·℃^-1 with the angular velocity of 20°/s.

关 键 词：电子技术 环境温度 角速度 流场 传感器 

分 类 号：TN37[电子电信—物理电子学]