基于柔性铰链放大的压电叠堆泵  

Piezoelectric stack pump based on flexure hinge magnification

作　　者：曲兴田[1] 董景石[1] 郭俊臣[1] 赵宏伟[1] 吴博达[1] 

机构地区：[1]吉林大学机械科学与工程学院,长春130022

出　　处：《吉林大学学报（工学版）》2008年第3期552-556,共5页Journal of Jilin University:Engineering and Technology Edition

基　　金：'863'国家高技术研究发展计划项目(2002AA404250;2005AA404220)

摘　　要：基于压电和精密驱动技术,利用压电叠堆作为驱动器,结合柔性铰链位移放大机构设计了流体泵样机,进行了试验研究。分析了压电叠堆Tokin AE0505D16的滞环特性,从理论上研究了该压电叠堆的刚度特性和快速响应特性。设计制造了用于位移放大的柔性铰链放大机构,对柔性铰链放大机构扭转变形和转角刚度的影响因素进行了理论分析,确定了所设计的柔性铰链放大机构各结构参数;测试了柔性铰链放大机构在不同电源激励下的动态响应、幅频特性、迟滞特性、输出力与输出位移特性,得出了影响放大机构放大倍数和输出特性的因素。利用有限元分析软件对放大机构进行了分析,进一步验证了放大机构的可行性和安全性。通过改变试验参数(电压、频率),对压电叠堆泵样机进行了实验研究,分析了输入电压、输入频率对泵输出流量和输出压力的影响程度。Based on piezoelectric precision drive technology, a hydro-pump using a piezoelectric stack as actuator and a flexible hinge as magnification mechanism was prototyped and tested. The hysteresis behavior of Tokin AE0505 D16 type piezoelectric stack was analyzed and its stiffness characteristic and dynamic response charateristic were studied theoretically. A flexible hinge mechanism to magnify the displacement was prototyped and the factor affecting its torsional deformation and torsional stiffness were analyzed, and its structual parameters were proposed. The dynamic response, the amplitude-frequency characteristic, the hysteresis behavior, and the force output versus displacement of the flexible hinge were tested under different power supply excitations, and the factor affecting the displacement magnification ratio and the output charateristics of the magnification mechanism were found. The flexible himge was also analyzed by a FEM simulation software and its feasibility and security were validated. The developed piezoelectric stack pump was tested under different input signal voltages and frequencies and the effects of the input on the output flow rate and pressure of the pump were obtained.

关 键 词：仪器仪表技术 压电叠堆 柔性铰链 有限元 压电叠堆泵 

分 类 号：TH703.8[机械工程—仪器科学与技术] TP242[机械工程—精密仪器及机械]