纳米金刚石薄膜的制备  

The fabrication of nano-diamond substrate for SAW device in high frequency and power

作　　者：杨保和[1] 崔建[1] 熊瑛[1] 陈希明[1] 孙大智[1] 李翠平[1] 

机构地区：[1]天津理工大学光电信息与电子工程系,薄膜电子与通信器件天津市重点实验室,天津300191

出　　处：《光电子．激光》2008年第5期625-627,共3页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金资助项目(60576011);天津市自然基金重点资助项目(05YFJZJC00400);天津市科技发展计划资助项目(06TXTJJC14701);天津市自然基金资助项目(05YFJMJC05300)

摘　　要：采用微波等离子体化学气相沉积系统,利用氢气、甲烷、氩气和氧气为前驱气体,在直径为5 cm的(111)取向镜面抛光硅衬底上沉积出高平整度纳米金刚石薄膜。利用扫描电镜、X射线衍射谱和共焦显微显微拉曼光谱我们分析了薄膜的表面形貌和结构特征。该薄膜平均粒径约为20 nm。X射线衍射谱分析表明该薄膜具有立方相对称(111)择优取向金刚石结构。在该薄膜一阶微显微拉曼光谱中,1332 cm-1附近微晶金刚石的一阶特征拉曼峰减弱消失,可明显观测到的三个拉曼散射峰分别位于1147 cm-1、1364 cm-1和1538 cm-1,与己报导的纳米金刚石拉曼光谱类似。该方法可制备出粒径约为20 nm粒度分布均匀致密具有较高含量的sp3键的纳米金刚石薄膜。A novel method to nano-diamond films is provided. Nano-diamond film has been prepared on（111）mirror polished Si substrate by microwave plasma chemical deposition system with mixture gases of H2 ,CH4,O2 and Ar. Combined SEM, golden phase micro-pictures,XRD spectrum and micro-Raman spectrum the morphology and structure of the film are characterized. It is found that the film has uniform particle size and the average size,of diamond particles is about 20 nm. According to the XRD spectrum,the film is cubic structure （111） diamond. And the only allowed Raman band in the first-order diamond spectrum near 1 332 cm^-1 decreases and can＇t be observed in the micro-Raman spectrum of the film. Three Raman band near 1 147 cm^-1 ,1 364 cm^-1 and 1 538 cm^-1 lie in the spectrum which are similar to the reported nano-diamond films. 20 nm plain diamond film with high concentration of spa is obtained by this method.

关 键 词：纳米金刚石薄膜 微波等离子体化学气相沉积 

分 类 号：O484.4[理学—固体物理]