用有限元模拟的方法研究大面积自支撑金刚石膜沉积过程中的热应力  

Thermal Stress Analysis of Large Area Free-standing Diamond Films Using Finite Element Method

作　　者：刘政[1] 李成明[1] 牛得草[1] 唐伟忠[1] 陈广超[1] 宋建华[1] 佟玉梅[1] 吕反修[1] 

机构地区：[1]北京科技大学材料科学与工程学院,北京100083

出　　处：《人工晶体学报》2008年第2期345-349,355,共6页Journal of Synthetic Crystals

基　　金：国家自然科学基金资助项目(No.50471090)

摘　　要：建立了没有过渡层和有过渡层的有限元模型,对大面积自支撑金刚石膜沉积过程中的热应力进行了研究。分别计算了在常用金属材料钼、钨、镍作衬底和用镀有钛过渡层的钼作衬底的情况下,膜/衬底间的热应力分布情况。模拟与实验的结果表明,在大面积自支撑金刚石膜沉积过程中,采用镀有钛过渡层的钼作衬底有利于热应力的释放,从而可能制备出高质量的大面积无裂纹金刚石膜。The thermal stresses in large area free-standing diamond films deposition using finite-element （FE） models with and without interlayer were investigated. Thermal stress distribution in film/substrate systems were calculated separately, one with Mo, W and Ni substrates and the other with Mo substrates with Ti interlayer. Both FE and experimental results showed that during large area free-standing diamond films deposition, Mo substrates with Ti interlayer have better effect on stress relaxation and crack-free large area diamond films with high quality can be deposited.

关 键 词：有限元 热应力 钛过渡层 自支撑金刚石膜 

分 类 号：O484[理学—固体物理]