微机电系统惯性电学开关的设计与制作  

A Novel Design and Fabrication of MEMS Electrical Inertia Micro-switch

作　　者：杨卓青[1] 丁桂甫[1] 蔡豪刚[1] 刘瑞[1] 赵小林[1] 

机构地区：[1]上海交通大学微米纳米加工技术国家级重点实验室,薄膜与微细技术教育部重点实验室,上海200030

出　　处：《中国机械工程》2008年第9期1033-1036,共4页China Mechanical Engineering

基　　金：国家863高技术研究发展计划资助项目(2006AA04Z308);国家重点基础研究发展计划资助项目(A1420060154)

摘　　要：基于非硅表面微加工技术,给出了微机电系统惯性电学开关的一种新式设计,该设计采用两端悬空固定的多孔弹性梁作为固定电极,由连体蛇形弹簧连接悬空的质量块作为可动电极,可动电极位于支撑层和弹性梁之间,该结构在保证微开关具有足够灵敏度的同时,可有效提高两电极间的接触效果和器件的抗冲击保护。使用成本较低的多次叠层电镀镍的方法制作了设计的微型惯性开关,并对其元器件进行了试验测试,结果表明:开关在100g加速度作用下的响应时间和接触时间分别约为0.40ms和12μs,与有限元动力学仿真结果吻合较好,表现出较高的灵敏度和良好接触效果。A novel design of MEMS electrical inertia micro--switch was proposed. In the design, an elastic beam with holes was used as the fixed electrode, and a suspended thicker mass block with conjoined snake springs was used as the mobile electrode locating between the supporting layer and the elastic beam. This designed switch structure benefits the improvement of the sensitivity, the contact effect, and protects the switch against intensive shock damage. The micro--switch had been fabricated using cost--effective electroplating nickel and tested subsequently. The result indicates that the response time and the contact time of the micro--switch are about 0.40ms and 12μs respectively when 100g acceleration is applied, which shows relatively better sensitivity and contact effect. This result has an agreement with that of dynamics finite element contact simulation about the designed micro-- switch.

关 键 词：非硅表面微加工 微型惯性开关 设计与制作 微机电系统(MEMS) 

分 类 号：TH703[机械工程—仪器科学与技术]