动态非线性压电驱动机电耦合动力学系统建模及其宽带高精度位移控制系统  

Modeling of dynamic nonlinear piezo-actuated electromechanical coupling dynamic system and its wideband high precision displacement control

作　　者：宾洋[1] 陈恳[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《光学精密工程》2008年第5期856-869,共14页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.50575119);中国博士后科学基金资助项目(No.20070410513)

摘　　要：研究了压电陶瓷驱动器的复杂非线性滞回动力学系统建模及其位移跟踪控制问题。采用状态空间方程,建立了一种新型压电驱动机电耦合动力学系统集总参数模型。该模型首次将动态本征非线性集成到压电叠堆的滞回特性中,并考虑了驱动器中弹性和运动部件的动力学特性。在此基础上,利用微分几何的输入输出线性化方法,导出了一个简化的线性规范型子系统。根据该子系统设计了一种基于LQ方法的非线性位移跟踪控制系统。与现有控制系统的对比仿真表明,本文提出的控制系统不仅消除了驱动器的稳态定位误差,有效地实现了整体动态性能的最优化,而且将其在-3 dB的截止频率从638 Hz扩展到5 217 Hz,频带宽度提高了将近一个数量级,较好地改善了驱动器的高速频响特性。The modeling and displacement tracking control of a piezoceramic actuator with complex nonlinear hysteresis was studied. A novel Piezo-actuated Electromechanical Coupling Lumped Parameter（PECLP） model was proposed by using the state space function. In this model, the intrinsic dynamic nonlinearity was combined into the piezoceramic stack＇s hysteresis for the first time, and the dynamics of elastic and motive components within actuator were considered simultaneously. Then, the input-output linearization theory of differential geometry was utilized to deduce a simplified subsystem with linear normal form. By this subsystem, a LQ based nonlinear displacement tracking control system was developed for piezoceramic actuator. In contrast with conventional control system, the computer simulation results show that the developed nonlinear displacement tracking control system ex- hibits a better tracking precision without static error, and a global optimization of system dynamic capability. Furthermore, the frequency bandwidth is expended by one order of magnitude approximately from 638 Hz to 5 217 Hz at -3 dB,which shows a satisfied high-speed frequency response characteristic.

关 键 词：压电驱动 机电耦舍 动态非线性滞回特性 输入输出线性化 位移跟踪控制 

分 类 号：TN384[电子电信—物理电子学] TP273[自动化与计算机技术—检测技术与自动化装置]