电容式MEMS器件模态频率的电学测试方法研究  

Study on electrical test method of mode frequency for capacitive MEMS devices

作　　者：侯占强[1] 肖定邦[1] 江平[1] 吴学忠[1] 

机构地区：[1]国防科技大学机电工程与自动化学院,湖南长沙410073

出　　处：《传感器与微系统》2008年第5期12-14,共3页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(50375154)

摘　　要：针对电容式MEMS器件,提出了一种基于调制解调原理的模态频率测试方法,详细介绍了该测试方法的测试原理和测试系统的组成。利用Ansys对某插齿式微加速度计进行了模态仿真分析,分析得到的模态频率为3 941 Hz,利用该测试方法对该微加速度计进行模态频率测试,得到的测试结果为3 440Hz。仿真与测试得到的结果接近,验证了该测试方法的有效性,产生偏差的主要原因可能是制造过程中的加工误差。A mode frequency test method for the MEMS capacitive devices is put forward based on modulation and demodulation. The test theory and the constitution of the test system are introduced. The simulated mode frequency of a comb microaccelerometer by Ansys is 3941Hz, and the measured mode frequency of this microaccelerometer by the test system is 3440 Hz, which is very close to the simulated result. So it can be concluded that the mode frequency test system works very well, and the difference between the simulated result and the measured result is mainly due to the fabrication imperfection.

关 键 词：微机电系统 模态频率 电容 调制解调 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]