基于Taguchi三次设计的微机械陀螺健壮性设计  

Robust Design for Micromachined Gyroscope Using Taguchi Three-Stage Design

作　　者：张正福[1] 王安麟[1] 刘广军[1] 姜涛[1] 焦继伟[2] 

机构地区：[1]同济大学机械工程学院,上海200092 [2]中国科学院上海微系统与信息技术研究所,上海200050

出　　处：《上海交通大学学报》2008年第2期249-252,共4页Journal of Shanghai Jiaotong University

基　　金：国家自然科学基金(50475019,50390063)资助项目;国家高技术研究发展计划(863)项目(2005AA404020)

摘　　要：提出了基于Taguchi三次设计的音叉振动式微机械陀螺的健壮性设计方法,即将Taguchi的三次设计方法同结构参数仿真试验的动态子结构法相结合,通过正交试验得到对系统性能敏感的关键结构变量,通过健壮性优化,获得关键结构参数组合扰动下系统性能指标变异最小的设计方案.研究结果表明,由微结构的微小尺度效应带来的加工误差的不确定、性能变异的难检测等复杂性问题,通过简单的健壮性设计修正其关键结构参数,实现极小化性能变异,即可显著提高其性能的信噪比,达到控制产品质量和性能的目的.This paper proposed a robust design method of a turning fork vibrating micromachined gyroscope using the Taguchi method, and determined the key variables sensitive to the systematic performance through an orthogonal test. Substructuring method is used in the simulation of structural parameters with the Taguchi methodology. The design project was presented, in which the smallest variances of the systematic performance indices are assured under the influence of the various disturbing factors. The results show that the complex problems such as the uncertainty of the processing errors caused by microscopic scale response, and the difficulties of measuring the performance variation can be settled by correcting the key structure parameters to realize the minimal variation of the performance through simple robust design, and that the signal/noise ratio can be improved. And the purpose of controlling the quality and the performance of products can be realized.

关 键 词：微机械陀螺 健壮性设计 子结构法 田口方法 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]