基于柔性铰链支承的热驱动硅微机械手的力学模型及性能分析  

Modeling and Performance Analysis of Electrothermal Actuating Microgripper with Flexure Hinge

作　　者：沈雪瑾[1] 王旭[1] 戚伟俊[1] 李科委[1] 吴文蕾[1] 

机构地区：[1]上海大学机械自动化系,上海200072

出　　处：《传感技术学报》2008年第2期284-287,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金重点项目资助(50135040);上海市教委重点学科科研项目资助(970104)

摘　　要：微机械手是一种典型的微型执行器,是微型机电系统(MEMS)的重要研究内容之一。以基于柔性铰链的电热驱动硅微机械手为研究对象,建立了微夹钳的二次超静定力学模型,导出了钳口处输出位移的解析式,并在此基础上对硅微机械手的性能进行了分析。分析表明,微夹钳的输出位移与柔性铰链切割半径成正比,切割半径越大,输出位移越大;对各加载电压下的微夹钳输出位移,其试验和理论结果的变化趋势一致,即微夹钳输出位移随输入电压的增加基本呈线性增加。The Microgripper, which is typical microactuator, is one of important research contents in MEMS. The electrothermal-actuating silicon microgripper with flexure hinges is taken as the research object, and the model of the superfluous system with two unknown variables is established. The formula of the microgripper＇s output displacement is deduced. And the microgripper＇s behavior is studied on the basis of theoretical analysis. The analytical results show that the microgripper＇ s output displacement is directly proportional to the radius of the flexure hinge. And about the microgripper ＇s output displacement under different applied voltages, the trend of test results is accordant with one of theoretical results, that is, the microgripper＇s output displacement increases linearly with rising of the input voltage on the whole.

关 键 词：微型机电系统 微机械手 V型梁电热致动器 柔性铰链 

分 类 号：TH112[机械工程—机械设计及理论] TN305[电子电信—物理电子学]