影响MEMS压控电容变化范围的因素分析  

Effects of Some Factors on Tunable-Range of MEMS Voltage-Controlled Capacitor

作　　者：曹天捷[1] 丁芳[2] 

机构地区：[1]中国民航大学交通工程学院,天津300300 [2]中国民航大学航空自动化学院,天津300300

出　　处：《电子器件》2008年第3期786-790,共5页Chinese Journal of Electron Devices

摘　　要：采用静电场力作用下二维三阶段微梁的静力分析模型,分析了影响两侧下拉电极MEMS压控电容可控范围的因素,这些因素包括:驱动电极的位置、电容极板的初始间隙、电容极板长度、介质层的厚度、介质的介电常数等,通过分析可以了解各因素对MEMS压控电容性能的影响以及这些因素之间的一些相互制约关系。分析结果可望能为两侧下拉电极MEMS压控电容的设计提供一些理论指导。The two-dimensional three-stage microbeam model subject to the electrostatic force is used to analyze effects of some factors on tunable-range of MEMS voltage-controlled capacitor. These factors include the position of the electrodes,the initial gap between the two electrodes of a capacitor,the length of electrodes of a capacitor, the thickness of the dielectrics, and the relative permittivity. From analysis the effects of the factors on the MEMS voltage-controlled capacitor and the relationships between them can be under-stood. Some theoretical suggestions may be useful to the design of the MEMS voltage-controlled capacitor.

关 键 词：MEMS 压控电容 微梁静力分析 静电场力 介质 

分 类 号：TN602[电子电信—电路与系统]