对称解耦硅微陀螺仪结构设计研究  

Structural Design Study of the Symmetrical and Decoupled Microgyroscope

作　　者：刘梅[1] 周百令[1] 夏敦柱[1] 

机构地区：[1]东南大学仪器科学与工程学院,南京210096

出　　处：《传感技术学报》2008年第3期435-438,共4页Chinese Journal of Sensors and Actuators

摘　　要：硅微机械陀螺仪的驱动模态和敏感模态间的交叉耦合制约了其性能的提高。设计了一种对称解耦硅微机械陀螺仪,它的驱动机构与检测机构都做线性滑膜阻尼振动且完全解耦,使得驱动和敏感模态之间的耦合小、结构振动平稳性好、品质因数高。该微陀螺仪的驱动与检测支承梁完全相同且对称分布,使得驱动模态和敏感模态的谐振频率受加工误差和温度变化的影响近乎相同,所以频率匹配性好,结构的灵敏度大大提高。实验测试结果表明对称硅微机械陀螺仪的耦合误差得到了有效减小,并且它的驱动和检测谐振频率仅相差6Hz,其品质因数在空气条件下分别为145和117,检测模态的品质因数与采用压膜阻尼振动方式进行检测的硅微机械陀螺仪相比有了显著提高。The cross coupling affects the performance of silicon microgyroscope. A symmetric and decoupling silicon microgyroscope was designed. The drive and sense supporting beams are same and symmetrically arranged. The drive and sense frequency are similarly affected by the manufacturing error and temperature change so that the frequency difference between drive and sense is small. The drive and sense machines vibrate linearly and are completely decoupled, so the coupling between drive and sense mode is small and the microgyroscope can oscillate steadily. Because the moving combs of the drive and sense machines glide along the fixed combs, the quality factor of the drive and sense mode is high and sensitivity is largely improved. The experiment was done and found the frequency difference between drive and sense is only 6Hz, and their quality factors are respectively 145.2 and 117 in the atmospheric environment. The results show that the coupling error is markedly decreased compared to the undecoupling microgyroscope.

关 键 词：硅微机械陀螺仪 对称解耦 结构设计 有限元仿真 

分 类 号：V245.554[航空宇航科学与技术—飞行器设计]