超高频体模式MEMS谐振器及其传感系统平台技术研究  

A Research on High Frequency MEMS Resonator Sensing Platform

作　　者：章新春[1] 张云峰[1] 赵建业[1] 于晓梅[1] 

机构地区：[1]北京大学信息科学技术学院,北京100871

出　　处：《传感技术学报》2008年第3期509-512,共4页Chinese Journal of Sensors and Actuators

基　　金：863项目资助(2006AA04Z336)

摘　　要：针对体模式MEMS谐振器激励和响应信号的特点,设计集成了激励信号产生和微弱信号检测的传感测量系统。系统通过对谐振器的扫频激励和检测响应信号,可以准确测量谐振器的谐振频率和Q值特性。为了有效测量谐振器产生的高频微弱位移电流信号,系统设计使用频谱搬移的测量方法。该方法通过把包含在高频信号中的有效信息搬移到低频端进行信号处理,可以提高信号抗噪声的能力,实现对微安量级的高频电流放大检测。A system solution for electrically characterization of high frequency resonator is presented. The system integrates both excitation signal generating and readout circuit for high frequency MEMS resonator in the PC board. Scanning of the AC excitation signal frequency and analyzing the resonator＇s response, the system is able to figure out the resonant frequency and Q factor of the resonator precisely. Frequency shifting method is used to measure the high frequency, ultra small motional current that MEMS resonator generates when excited. It shifts useful information from high frequency to low band to simplify the processing of signal and optimize the ability of anti noise. The system is able to amplify and process small current signals as low as μA units.

关 键 词：体模式谐振器 MEMS 微弱电流信号放大 DDS 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置] TN815[自动化与计算机技术—控制科学与工程]