基于受力分析的MEMS薄膜系统级模拟方法的研究  

The Method of System-Level Simulation for a MEMS Membrane Based on the Force Analysis Research

作　　者：李蓓佳[1] 李伟华[1] 

机构地区：[1]东南大学MEMS教育部重点实验室,南京210096

出　　处：《传感技术学报》2008年第4期607-610,共4页Chinese Journal of Sensors and Actuators

基　　金：国家863项目支持(2006AA04Z302)

摘　　要：介绍一种MEMS系统级模拟方法。该方法直接分析运动物体的受力情况,并结合能量原理,利用受控源的反馈实现耦合作用,建立机电耦合MEMS薄膜的等效电路模型。利用该等效电路实现对薄膜动态行为的系统级模拟,并将Spice和有限元法,Saber的模拟结果进行对比,验证了该模拟方法应用于二维情况分析的有效性。A method for MEMS system-level simulation is proposed , which is based on the force analysis of the moving device. And combined with the energy principle, the coupling process is implemented by feedback mechanism of controlled sources. Then the equivalent circuit macromodel is developed, which is used to carry out the system-level simulation of the dynamic behavior of the electromechanics coupled thin membrane. Simulation results in Spice are compared with that in FEM and Saber, verifying such simulation method can be applied to the case of 2-D.

关 键 词：MEMS设计 系统级模拟 薄膜 受力分析 等效电路宏模型 

分 类 号：TN402[电子电信—微电子学与固体电子学]