光栅光阀MEMS光开关系统设计  

System design on grating light valve micro-electro-mechanical systems optical switch

作　　者：喻洪麟[1] 鲁双全[1] 

机构地区：[1]重庆大学光电工程学院光电技术及系统教育部重点实验室,重庆400030

出　　处：《重庆大学学报（自然科学版）》2008年第6期619-622,共4页Journal of Chongqing University

基　　金：教育部博士学科点专项科研基金资助项目(20060611031);重庆市自然科学基金资助项目(CSTC2007BB2202)

摘　　要：分析了光栅光阀(grating light valve,GLV)的光学特性,对GLV结构进行了计算机仿真。利用GLV在静电力驱动下具有较高的光学效率、快速的调制速率等优点,基于平行平板电容模型的GLV模拟算法,设计了光栅光阀1×2 MEMS(micro-electro-mechanical systems,微机电系统)光开关,经CoventorWare仿真表明,在1.55μm光波长正入射及给定GLV参数时,所设计的光开关1级衍射效率达到50%,开关时间为微秒级,并具有耐磨损、时间快、寿命长等特点。Using a computer, the structure of a grating light valve （GLV） was simulated based on analysis of optics characteristic of a GLV. Driven by the electrostatic force, the GLV has high optical efficiency and high switching speed. These traits were used to design a 1 × 2 micro-electro-mechanical systems （MEMS） optical switch in order to improve upon the traditional MEMS optical switches shortcomings, such as easy wear, slow switching times, and short switching lives. The simulation experiment using CoventorWare shows the first-order diffraction efficiency achieves 50% and the switching time is at microsecond level when the 1.55 /μm light wave length is in normal incidence and the given parameters of GLV are assigned.

关 键 词：光栅光阀 MEMS 光开关 衍射效率 开关时间 

分 类 号：TN256[电子电信—物理电子学]