直接感光法制备锆钛酸铅镧薄膜图形及其性能  

Pattern Fabrication on PLZT Films and Their Properties by a Direct Patterning Process

作　　者：张卫华[1] 石春梅[1] 袁媛[1] 赵高扬[1] 盛淑月[1] 

机构地区：[1]西安理工大学材料科学与工程学院,西安710048

出　　处：《Journal of Semiconductors》2008年第6期1189-1193,共5页半导体学报（英文版）

基　　金：*陕西省自然科学基金(批准号:2004E102);西安应用材料创新基金(批准号:XA-AM-200611);陕西省电工材料与溶(浸)渗技术重点实验室基金资助项目~~

摘　　要：采用化学修饰溶胶凝胶工艺,以PVP为薄膜开裂抑制剂,以苯酰丙酮为化学修饰剂,利用其与金属盐形成的配位螯合物结构,合成了具有紫外光感应特性的锆钛酸铅镧(Pb0.91La0.09(Zr0.65Ti0.35)O3,PLZT)前驱溶胶;对单次提拉得到的凝胶薄膜进行直接感光法图形制备;通过后续热处理,在Pt/TiO2/SiO2/Si衬底上得到了具有钙钛矿结构的PLZT薄膜图形,其最终热处理后的膜厚约为260nm,剩余极化强度约为6.7μC/cm2,矫顽场强约为77kV/cm,相对介电常数约为356,介电损耗约为0.02,漏电流密度小于10-2μA/cm2,极化疲劳特性可达107以上.The photosensitive Pb0.91 La0.09 （Zr0.65 Ti0.35）O3 （PLZT） precursor sols are prepared by a modified sol-gel process with benzoylacetone as chemical modification to form a coordination chelate structure of metal-salt with PVP as an addition agent for suppressing film cracks. The patterns of PLZT gel films are prepared by direct patterning process and single dip-coating,and the PLZT film patterns with perovskite structure on Pt/TiO2/SiO2/Si substrate are obtained after heat-treatment. The PLZT film＇s pattern thickness is about 260nm, of which the remnant polarization, coercive field, and fatigue behavior are about 6.7μC/cm^2 ,77kV/cm, and 107 respectively. The dielectric loss and dielectric constant are 0.02 and 356 at 10kHz, respectively.

关 键 词：锆钛酸铅镧薄膜 溶胶凝胶 微细图形 感光性 

分 类 号：TN23[电子电信—物理电子学]